The NanoAir™ Condensation Particle Counter (CPC) brings lab-grade size sensitivity, a robust design, and easy operation.
Compact yet powerful, the NanoAir measures aerosol contaminants down to 10nm in size while using only a small footprint in your production area. Working fluid is securely contained and efficiently consumed at a minimal rate.
With the smart manifold ParticleSeeker™, you can measure up to 10 locations with ease. Sampling is programmable to match your unique process flow.
BENEFITS
• Small footprint
• Lightweight
• Innovative working fluid design
• Savings on maintenance and fewer failure points
• Does not generate particles
• Low risk of unwanted fluid migration
• Designed for internal tool use
• Robust fluidics design for transport and orientation
FEATURES
• Combines with ParticleSeeker, the only nanoparticle manifold on
the market
• Runs on an external vacuum with no internal pumps or fans
• Automatic shutoff with drop in flowrate
• Communication protocols: TCP/IP PMS protocol (Facility Net),
Modbus, 4-20mA, Bluetooth
• USB-C data download and serial configuration for custom dwell
and tare time
• Visible Indicators (LEDs): Fluid, Status, Power
• Minimal time between sample points
• Swappable Base Station minimizes downtime from preventative
maintenance and calibration
• HPD III compatibility for compressed gas monitoring
APPLICATIONS
• Semiconductor process areas
• Equipment Front End Modules (EFEM)
• Compressed gas monitoring
• Trend analysis
Specification
NanoAir 10 Aerosol Particle Counter
| Size range | 10nm (minimal detectable size @ D50) |
| Aerosol flow rate | 2.8 LPM (0.1CFM) ±5% |
| Sampling period | 0.2 to 3600 seconds, user-selectable |
| Max. particle concentration | 200,000 #/ft³ @10% coincidence loss |
| Zero Count | <1.5#/m³, Does not have to use false count subtraction |
| Volumetric Sample % | 100% – no shealth flow |
| Counting Effeciency | 10nm = 50% ± 20%, 15nm = 100% ± 10% |
| Calibration | yearly |
| Instrument warm-up time | 20 minutes, norminal |
| Working fluid | Organic, non-toxic, non-flammable 240ml total working fluid volume |
| Working fluid cpmsuption and instrument volume | 12 months between refills 240 ml total working fluid volume |
| Sample tubing | Static Control Polyurethane Tubing 6mm OD, 4mm ID (PMS P/N: 1000026711) |
| Sample tubing length | ≤ 20m (33 feet) |
| Laser classification | Class 1, complies with US 21 CFR 1040.10 and EN60825-1. Internally an enclosed Class 3B laser is used per EN60825-1 |
| Data storage | > 10,000 samples |
| Dimensions (l,w,h) | 8.0 x 6.0 x 6.5 in (20.3 x 15.2 x 16.5 cm) |
| Weight | 6.1 lb (2.8kg) |
| LED indication | Power, flow error, laser error, activity, working fluid level |
| Power | External AC to DC Power Supply: Input: 100-240 VAC, 50/60Hz, 1.5A Output: 24VDC 5.0AAC input voltage fluctuation shall not exceed ±10% |
| Communications | – Ethernet connectivity (PMS Proprietary, Modbus TCP/IP) – Serial USB – 4-20mA 4 IN, 2 OUT – Dry contact relay (4) |
| Analogs Input/ Output | 4x 4-20mA analog input ports 2x 4-20mA analog output ports |
| Operating Temperature range | 50 – 90°F (10 – 32°C) |
| Humidity range | 0 – 60%RH, non-condensing |
| Operating pressure | 1 Atmosphare (ambient) |
| Power | 24VDC, 5Amp |
| Installation requirements (with external AC to DC power supply) | – Indoor use only – Pollution degree 2 – Over voltage category I – Ordinary protection (not protected against harmful ingress of moisture) – External AC to DC Power Supply + Over voltage category II + Class I Equipment (Electrical earth ground from the mains power source to the product input is required for safety.) |
| Status Indicators | – Power button LED Ring (4-color, operational states – Front Edge and corner LED (4-color, operational states) – Working Fluid Level indicator (8 level real-time level detection |
Particle Seeker
| Sample Ports | 10 ports supporting a single particle counting instrument |
| Sample Flowrate | 0.1 CFM |
| Bulk Flowrate | 0.2 to 0.3 CFM per port (norminal) |
| Purge time between ports | 0-30 seconds, user configurable (recommended min 1 sec) |
| Sample Interval Time | Minimum 1 second, Maximum 3600 seconds |
| Sample Modes | Sequential, Scanning, Ensemble mode, Patterned |
| Crosstalk ≥ 10nm | ≤ 0.01% |
| Sample tubing | Static Control Polyurethane Tubing 6mm OD, 4mm ID (PMS P/N: 1000026711) |
| Sample tubing length | ≤ 6m (20 feet) per port, sample tubing must be of equal length for all ports |
| Fittings provided | 10 self-locking, 6mm OD, push-fit fittings |
| Vacuum required | ≥ 12inHg VAC, 3.0CFM |
| Data storage | ≥ 10,000 samples |
| Power | External AC to DC Power supply: Input: 100 – 240 VAC, 50/60Hz, 1.5A Output: 24VDC 5.0A Current Draw: 1A @24VDC |
| Dimensions (l,w,h) | 8.2 x 5.4 x 4.7in (21x14x12cm) |
| Weight | 2.2lb (1kg) |
| Operating Temperature range | 50 – 95°F (10 – 35°C) |
| Humidity range | 0 – 60%RH, non-condensing |
HPD III High Pressure Diffuser with NanoAir 0.1CFM CPC
| Sample Ports | High Pressure (CDA) 25 – 100psi |
High Pressure (Nitrogen) 22.5 – 95psi |
High Pressure (Argon) 119psi |
High Pressure (CO₂) 126 psi |
| Particle size range | ≥ 0.10 nm | |||
| Temperature range | Typical: 39 – 86°F (4 – 30°C) | |||
| Humidity | 0 – 85%RH, non-condensing | |||
| Material | Enclosure: 316: stainless steel body, exhaust filter Gaskets: 316 stainless steel, Buna-N O-rings | |||
| Sample Gas | Dry, inert, non-toxic, non-flammable gases (CDA, nitrogen, argon, carbon dioxide) | |||
| Inlet fitting | Male 4-VCR fitting, #4 size, class 316L stainless steel with Ruby orifice | |||
| Exhaust fitting | Barb fitting for 4mm ID | |||
| Tubing length | 1m (39.4in) maximum | |||
| Dimensions (h,w,d) | 15 x 2.75 x 5.5in (38 x 7 x 14cm) | |||
| Weight | 2.7 lb (1.25kg) | |||
| Compatible instruments | NanoAir | |||
