Electrostatic Voltage Sensor Designed for Inline Monitoring of Electrostatic Charge Build-Up

Advanced Energy’s Trek 875 electrostatic voltage sensor is designed for inline monitoring of electrostatic charge build-up, which if left unchecked would disrupt manufacturing processes and/or cause product degradation and early life failure of semiconductors and other charge-sensitive components.

• Measurement Range: 0 to ±500 VDC or peak AC
• Response Speed: Less than 25 ms for a 0 to ±500 V step change

Overview

The Trek® 875 electrostatic voltage sensor is used to monitor static charge levels within manufacturing equipment such as conveyors, handlers, and other tools. The Trek 875 features an automatic calibration technique to maintain high accuracy and speed over wide variations of the spacing between the non-contacting measurement probe and the surface under test.

Other features include a voltage measurement range of ±500 VDC or peak AC, accuracy of ±0.5%, speed of 25 ms, and low noise of 1% rms of full-scale. Buffered output voltage and current monitors (4 to 20mA) are provided for remote monitoring and alarm purposes. The instrument is powered by +24 VDC and is housed in a standard DIN package to enable standardized mounting.

Benefits

• Select from two available probe types, side view and 45° angle
• Mount the enclosure on a 35 mm DIN rail
• Use TTL digital enable input and TTL fault warning flag output

 

Features

• Accuracy is independent of probe-to-measured surface spacing
• 4 to 20 mA current monitor
• Voltage monitor with an accuracy better than ±0.5% of full-scale

• Performance

  Measurement Range

   

  0 to ±500 V DC or peak AC

   

  Measurement Accuracy

   

  • At the Voltage Monitor Output: Better than ±0.5% of full-scale
  • At the Current Monitor Output: Better than ±3% of full-scale

   

  Current Monitor (4-20 mA)

   

  Linearly related to the measured input voltage

   

  Scale Factor

   

  (+4 mA to +20 mA representing a -500 V to +500 V): -500 V = 4 mA, 0 V = 12 mA, +500 V = 20 mA

   

  Speed of Response (10 to 90%)

   

  Less than 25 ms for a 0 to ±500 V step change

• Probe

  Probe Dimensions

   

  5.6 mm square x 50 mm L

   

  Aperture Orientation / Body Type

   

  Side / square

   

  Probe Cable Length

   

  3.0 ±0.1 m

   

  Recommended Probe-to-Surface Separation

   

  4 mm ±1 mm

• General

  Power Supply Voltage

   

  +24 V DC ±10%

   

  Power Indicator

   

  A LED indicator illuminates when power is applied to the unit