NanoAir™ 10 Aerosol Particle Counter

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The NanoAir™ Condensation Particle Counter (CPC) brings lab-grade size sensitivity, a robust design, and easy operation.

Compact yet powerful, the NanoAir measures aerosol contaminants down to 10nm in size while using only a small footprint in your production area. Working fluid is securely contained and efficiently consumed at a minimal rate.

With the smart manifold ParticleSeeker™, you can measure up to 10 locations with ease. Sampling is programmable to match your unique process flow.

BENEFITS
• Small footprint
• Lightweight
• Innovative working fluid design
• Savings on maintenance and fewer failure points
• Does not generate particles
• Low risk of unwanted fluid migration
• Designed for internal tool use
• Robust fluidics design for transport and orientation

FEATURES
• Combines with ParticleSeeker, the only nanoparticle manifold on
the market
• Runs on an external vacuum with no internal pumps or fans
• Automatic shutoff with drop in flowrate
• Communication protocols: TCP/IP PMS protocol (Facility Net),
Modbus, 4-20mA, Bluetooth
• USB-C data download and serial configuration for custom dwell
and tare time
• Visible Indicators (LEDs): Fluid, Status, Power
• Minimal time between sample points
• Swappable Base Station minimizes downtime from preventative
maintenance and calibration
• HPD III compatibility for compressed gas monitoring

APPLICATIONS
• Semiconductor process areas
• Equipment Front End Modules (EFEM)
• Compressed gas monitoring
• Trend analysis

Specification

NanoAir 10 Aerosol Particle Counter

Size range 10nm (minimal detectable size @ D50)
Aerosol flow rate 2.8 LPM (0.1CFM) ±5%
Sampling period 0.2 to 3600 seconds, user-selectable
Max. particle concentration 200,000 #/ft³ @10% coincidence loss
Zero Count <1.5#/m³, Does not have to use false count subtraction
Volumetric Sample % 100% – no shealth flow
Counting Effeciency 10nm = 50% ± 20%, 15nm = 100%  ± 10%
Calibration yearly
Instrument warm-up time 20 minutes, norminal
Working fluid Organic, non-toxic, non-flammable
240ml total working fluid volume
Working fluid cpmsuption and instrument volume 12 months between refills 240 ml total working fluid volume
Sample tubing Static Control Polyurethane Tubing 6mm OD, 4mm ID (PMS P/N: 1000026711)
Sample tubing length ≤ 20m (33 feet)
Laser classification Class 1, complies with US 21 CFR 1040.10 and EN60825-1. Internally an enclosed Class 3B laser is used per EN60825-1
Data storage > 10,000 samples
Dimensions (l,w,h) 8.0 x 6.0 x 6.5 in (20.3 x 15.2 x 16.5 cm)
Weight 6.1 lb (2.8kg)
LED indication Power, flow error, laser error, activity, working fluid level
Power External AC to DC Power Supply: Input: 100-240 VAC, 50/60Hz, 1.5A Output: 24VDC 5.0AAC
input voltage fluctuation shall not exceed ±10%
Communications – Ethernet connectivity (PMS Proprietary, Modbus TCP/IP)
– Serial USB
– 4-20mA 4 IN, 2 OUT
– Dry contact relay (4)
Analogs Input/ Output 4x 4-20mA analog input ports 2x 4-20mA analog output ports
Operating Temperature range 50 – 90°F (10 – 32°C)
Humidity range 0 – 60%RH, non-condensing
Operating pressure 1 Atmosphare (ambient)
Power 24VDC, 5Amp
Installation requirements (with external AC to DC power supply) – Indoor use only
– Pollution degree 2
– Over voltage category I
– Ordinary protection (not protected against harmful ingress of moisture)
– External AC to DC Power Supply
+ Over voltage category II
+ Class I Equipment (Electrical earth ground from the mains power source to the product input is required for safety.)
Status Indicators – Power button LED Ring (4-color, operational states
– Front Edge and corner LED (4-color, operational states)
– Working Fluid Level indicator (8 level real-time level detection

Particle Seeker

Sample Ports 10 ports supporting a single particle counting instrument
Sample Flowrate 0.1 CFM
Bulk Flowrate 0.2 to 0.3 CFM per port (norminal)
Purge time between ports 0-30 seconds, user configurable (recommended min 1 sec)
Sample Interval Time Minimum 1 second, Maximum 3600 seconds
Sample Modes Sequential, Scanning, Ensemble mode, Patterned
Crosstalk ≥ 10nm ≤ 0.01%
Sample tubing Static Control Polyurethane Tubing 6mm OD, 4mm ID (PMS P/N: 1000026711)
Sample tubing length ≤ 6m (20 feet) per port, sample tubing must be of equal length for all ports
Fittings provided 10 self-locking, 6mm OD, push-fit fittings
Vacuum required ≥ 12inHg VAC, 3.0CFM
Data storage ≥ 10,000 samples
Power External AC to DC Power supply:
Input: 100 – 240 VAC, 50/60Hz, 1.5A
Output: 24VDC 5.0A
Current Draw: 1A @24VDC
Dimensions (l,w,h) 8.2 x 5.4 x 4.7in (21x14x12cm)
Weight 2.2lb (1kg)
Operating Temperature range 50 – 95°F (10 – 35°C)
Humidity range 0 – 60%RH, non-condensing

HPD III High Pressure Diffuser with NanoAir 0.1CFM CPC

Sample Ports High Pressure (CDA)
25 – 100psi
High Pressure (Nitrogen)
22.5 – 95psi
High Pressure (Argon)
119psi
High Pressure (CO₂)
126 psi
Particle size range ≥ 0.10 nm
Temperature range Typical: 39 – 86°F (4 – 30°C)
Humidity 0 – 85%RH, non-condensing
Material Enclosure: 316: stainless steel body, exhaust filter Gaskets: 316 stainless steel, Buna-N O-rings
Sample Gas Dry, inert, non-toxic, non-flammable gases (CDA, nitrogen, argon, carbon dioxide)
Inlet fitting Male 4-VCR fitting, #4 size, class 316L stainless steel with Ruby orifice
Exhaust fitting Barb fitting for 4mm ID
Tubing length 1m (39.4in) maximum
Dimensions (h,w,d) 15 x 2.75 x 5.5in (38 x 7 x 14cm)
Weight 2.7 lb (1.25kg)
Compatible instruments NanoAir